Near-Zero Power Wake Up System Enabled by Ultra High Q-Factor Array of MEMS Resonators

This paper discusses an approach for continuous and low-power sensing of infrequent, high consequence events. The envisioned sub-10 nW power consumption architecture includes an RF detector, an array of MEMS resonators, and an IC detector. This paper focuses on the MEMS resonator array. We show that MEMS resonators with the Quality factor on the order of 1M can solve the challenging problem of passive detection, converting the 4 μV peak-to-peak voltages from low-power RF detector to an above Brownian noise detection signal by the MEMS resonator. Wafer-scale glassblowing technology is developed, demonstrating devices with the Q-factor of 1.1M, and thus potentially meeting one of the requirements. We also discuss high aspect ratio structures with nm level electrostatic gaps, essential for an efficient capacitive transduction. We propose several design architectures, including “collapsed electrode” and “sacrificial layer” methods, all projected to provide nm-size capacitive gaps.